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EFC Technology

Electromagnetic Filtering Cathode Technology (EFC)

The combination of pulsed electromagnetic field and fixed magnetic field scans the entire target surface so that the target surface is evenly etched. The unique electromagnetic power supply can output in both positive and negative directions, control the uniform scaling of arc spot on the target surface, reduce the generation of large particles. And the coating is dense and smooth. 

Characteristic:

  • Coatings of new metal compounds or nitride films (nitrogen atmosphere)
  • Coatings of amorphous carbon, nano diamond and carbon nanotubes nanoparticles
  • Coatings of thermoelectric thin film with thermoelectric material target

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